Surface third and fifth harmonic generation at crystalline Si for non-invasive inspection of Si wafer’s inter-layer defects

Gao, Yi, Hyub Lee, Jiannan Jiao, Byung Jae Chun, Seungchul Kim, Dong-Hwan Kim, and Young-Jin Kim. “Surface third and fifth harmonic generation at crystalline Si for non-invasive inspection of Si wafer’s inter-layer defects.” Optics Express 26, no. 25 (2018): 32812-32823.